ZnO film production system and production method using ZnO film production system having heating units and control device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Apr 4, 2017
Grant Date -
Aug 13, 2015
app pub date -
Jun 19, 2013
filing date -
Jul 27, 2012
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A ZnO film production method includes: disposing a substrate on an installation base; and, while supplying chlorine gas from a chlorine gas supply source to a first raw material storing part R1 and supplying oxygen gas from a third gas supply source (oxygen gas supply source) G3 into a reaction container, controlling heating units (heaters H1, H2 and H3) with a control device CONT such that temperature T1 of the first raw material storing part R1, temperature T2 of a second raw material storing part R2 and temperature T3 of the installation base on which the substrate is disposed satisfy a relationship of T1
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully