Method for producing metal oxide layers through arc vaporization
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United States of America Patent
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Apr 4, 2017
Grant Date -
Oct 29, 2009
app pub date -
Apr 24, 2009
filing date -
Apr 24, 2008
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Abstract
The invention relates to a method for producing oxidic layers by means of PVD (physical vapor deposition), in particular by means of cathodic arc vaporization, wherein a powder-metallurgical target is vaporized and the powder-metallic target is formed of at least two metallic or semi-metallic components, the composition of the metallic or semi-metallic components of the target being chosen in such a manner that during heating in the transition from the room temperature into the liquid phase no phase boundary of purely solid phases, based on the phase diagram of a molten mixture of the at least two metallic or semi-metallic components, is crossed.
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