Microfabricated optical apparatus

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United States of America Patent

PATENT NO 9608731
SERIAL NO

14931883

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Abstract

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A microfabricated optical apparatus that includes a light source driven by a waveform, a turning mirror, and a beam shaping element, wherein the waveform is delivered to the light source by at least one through silicon via.

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Patent Owner(s)

Patent OwnerAddress
INNOVATIVE MICRO TECHNOLOGYGOLETA CA 93117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gudeman, Christopher S Lompoc, US 51 450

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