Charged particle multi-beam apparatus including a manipulator device for manipulation of one or more charged particle beams
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United States of America Patent
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Mar 28, 2017
Grant Date -
Dec 6, 2012
app pub date -
May 30, 2012
filing date -
May 30, 2011
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Abstract
The invention relates to a method and a device for manipulation of one or more charged particle beams of a plurality of charged particle beamlets in a charged particle multi-beamlet apparatus. The manipulator device comprises a planar substrate comprising an array of through openings in the plane of the substrate, each of these through openings is arranged for passing the at least one charged particle beamlet there through, wherein each of the through openings is provided with one or more electrodes arranged around the through opening, and a electronic control circuit for providing control signals to the one or more electrodes of each through opening, wherein the electronic control circuit is arranged for providing the one or more electrodes of each individual through opening with an at least substantially analog adjustable voltage.
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