Apparatus of plural charged-particle beams
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United States of America Patent
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Mar 28, 2017
Grant Date -
Nov 17, 2016
app pub date -
May 10, 2016
filing date -
May 12, 2015
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Abstract
One modified source-conversion unit and one method to reduce the Coulomb Effect in a multi-beam apparatus are proposed. In the modified source-conversion unit, the aberration-compensation function is carried out after the image-forming function has changed each beamlet to be on-axis locally, and therefore avoids undesired aberrations due to the beamlet tilting/shifting. A Coulomb-effect-reduction means with plural Coulomb-effect-reduction openings is placed close to the single electron source of the apparatus and therefore the electrons not in use can be cut off as early as possible.
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