Thermal measurements using multiple frequency atomic force microscopy
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United States of America Patent
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Mar 28, 2017
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Jan 8, 2015
app pub date -
Mar 25, 2014
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Jun 16, 2008
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Abstract
Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information from piezoelectric, polymer and other materials using contact resonance with multiple excitation signals are also described.
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