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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
SPTS TECHNOLOGIES LIMITED	COED RHEDYN RINGLAND WAY NEWPORT NP18 2TA

International Classification(s)

• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Ashraf, Huma	Newport, GB	16	498
# of filed Patents : 16 Total Citations : 498

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Patent Citation Ranking

• 1 Citation Count
• H01L Class

• 18.50 % this patent is cited more than
• 8 Age

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Sep 21, 2028

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
March 21, 2017	US,9601341,B2   US9601341B2	GRANTED PATENT AS SECOND PUBLICATION
June 25, 2015	US,20150179468,A1   US20150179468A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 9601341

Method of etching

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Abstract

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A method of etching a feature in a substrate includes forming a mask structure over the substrate, the mask structure defining at least one re-entrant opening, etching the substrate through the opening to form the feature using a cyclic etch and deposition process, and removing the mask.

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Description

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Claims

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Legal Events

 

• MAFP2024
• MAFP2020
• I2017
• STCF2017
• P2015
• AS2015
• F2014
• PD2013

Date	Code	Event	Description
Sep 23, 2024	MAFP	MAINTENANCE FEE PAYMENT	free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 8
Sep 21, 2020	MAFP	MAINTENANCE FEE PAYMENT	free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 4
Mar 21, 2017	I	Issuance
Mar 01, 2017	STCF	INFORMATION ON STATUS: PATENT GRANT	free format text: PATENTED CASE
Jun 25, 2015	P	Published
Jan 08, 2015	AS	ASSIGNMENT	free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:ASHRAF, HUMA;REEL/FRAME:034720/0557 Owner name: SPTS TECHNOLOGIES LIMITED, UNITED KINGDOM Effective Date: Jan 08, 2015
Dec 19, 2014	F	Filing
Dec 23, 2013	PD	Priority Date