Doping profile measurement using terahertz time domain spectroscopy (THz-TDS)
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United States of America Patent
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Mar 21, 2017
Grant Date -
May 19, 2016
app pub date -
Nov 13, 2015
filing date -
Nov 13, 2014
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Abstract
A system and method for determining a doping profile of a sample includes a generator and at least one detector of terahertz light of multiple frequencies, configured to operate in a transmission and/or reflection mode; a materials refractive index library; and an inverse algorithm that can match simulated spectra using a trial doping profile and the materials library with the measured spectra from a sample, and map out or measure an activated doping profile into, or a free carrier distribution into, the interior of the sample.
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