Angular velocity sensor, electronic apparatus, and moving object
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United States of America Patent
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Mar 21, 2017
Grant Date -
Apr 30, 2015
app pub date -
Oct 30, 2014
filing date -
Oct 31, 2013
priority date (Note) -
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Abstract
In an angular velocity sensor, when a width of a detection frequency band is set to f1 [Hz], a resonance frequency in a first rotational vibration mode in which a base portion rotates and vibrates around a detection axis with respect to fixing units in association with the deformation of beam portions is set to f2 [Hz], a detuning frequency is set to f3 [Hz], and a resonance frequency in a second rotational vibration mode, having a phase opposite to that of the first rotational vibration mode, in which the base portion rotates and vibrates around the detection axis with respect to the fixing units in association with the deformation of the beam portions is set to f4, a relation of f1
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