Gas pumping and treatment device
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United States of America Patent
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Mar 21, 2017
Grant Date -
Oct 2, 2014
app pub date -
Oct 19, 2012
filing date -
Oct 19, 2011
priority date (Note) -
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Abstract
A device for pumping and treating gases is disclosed. The device features a stator having a plurality of pumping stages connected in series one after another between a suction side and a delivery side by the inter-stage ducts. The device also includes an inner tube and a blind outer tube, the tubes inserted one inside the other and made of ceramic material, the inner tube connected to the delivery side of the rotor housing of a pumping stage and the outer tube connected to the stator and communicating with at least one inter-stage duct formed in the stator, the tubes defining a path for the pumped gases. The device also includes a plasma source located outside the stator to generate a plasma in the path of the pumped gases.
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