Electrostatic actuator
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United States of America Patent
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Mar 14, 2017
Grant Date -
Jan 31, 2013
app pub date -
Apr 28, 2011
filing date -
May 28, 2010
priority date (Note) -
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Abstract
An electrostatic actuator 100 includes: a stator 1 that includes a substrate 102 and a plurality of linear electrodes 1a to 1d separately provided on the substrate 102 and arranged in parallel; and a movable element 2 disposed on the linear electrodes 1a to 1d of the stator 1. Multiple projecting elements 104b are provided at regular intervals on a surface of the stator 1 so as to face the movable element 2, forming a mat surface. A smooth layer 105 is formed on a surface of the movable element 2 so as to face the mat surface.
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