Magnetic lens for focusing a beam of charged particles
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United States of America Patent
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Mar 14, 2017
Grant Date -
Jan 22, 2015
app pub date -
Jul 16, 2014
filing date -
Jul 18, 2013
priority date (Note) -
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Abstract
A magnetic lens for focusing a beam of charged particles traveling along an optical axis includes
- an axial bore disposed around said optical axis;magnetic field generating means; andmagnetic yoke, to guide and concentrate said magnetic field toward said optical axis so as to form a focusing region,whereinSaid yoke has a composite structure, comprising an outer primary portion and an inner secondary portion;Said secondary portion is mounted as a monolithic insert within said primary portion so as to be disposed around said focusing region;Said secondary portion comprises a waist region surrounding said bore and acting as a magnetic constriction, configured such that said magnetic field undergoes saturation in said waist region, thereby causing magnetic flux to exit the waist region and form a focusing field in said focusing region.
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