On-axis focus sensor and method
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United States of America Patent
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Mar 14, 2017
Grant Date -
Dec 18, 2014
app pub date -
Dec 20, 2012
filing date -
Dec 23, 2011
priority date (Note) -
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Abstract
A focus height sensor in an optical system for inspection of semiconductor devices includes a sensor beam source that emits a beam of electromagnetic radiation. A reflector receives the beam of electromagnetic radiation from the sensor beam source and directs the beam toward a surface of a semiconductor device positioned within a field of view of the optical system. The reflector is positioned to receive at least a portion of the beam back from the surface of the semiconductor device to direct the returned beam to a sensor. The sensor receives the returned beam and outputs a signal correlating to a position of the surface within the field of view along an optical axis of the optical system.
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