Compositions of low-K dielectric sols containing nonmetallic catalysts
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United States of America Patent
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Mar 7, 2017
Grant Date -
Apr 21, 2016
app pub date -
Dec 21, 2015
filing date -
Oct 31, 2012
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Abstract
A sol composition for producing a porous low-k dielectric material is provided. The composition can include at least one silicate ester, a polar solvent, water, an acid catalyst for silicate ester hydrolysis, an amphiphilic block copolymer surfactant, and a nonmetallic catalyst that reduces dielectric constant in the produced material. The composition can further include a metallic ion at a lower parts-per-million concentration than the nonmetallic catalyst, and/or the composition can further include a cosolvent. A method of preparing a thin film on a substrate using the sol composition is also provided.
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