Method for polishing a polymer surface
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United States of America Patent
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Mar 7, 2017
Grant Date -
Oct 29, 2015
app pub date -
Apr 17, 2015
filing date -
Apr 28, 2014
priority date (Note) -
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Abstract
A method for polishing a polymer surface is provided by an embodiment of the present invention. The method includes: curing the polymer surface; polishing the polymer surface cured through a CMP process. By using the method for polishing a polymer surface provided by embodiments of the present invention, the mentioned problems in the prior art are solved. The uniformity of the polymer surface can be improved to <1% through a CMP process, which can meet the requirements of high density and small linewidth integration.
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