Multi-dopant permeation tube with two chambers for introducing dopants into a spectrometry system
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United States of America Patent
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Mar 7, 2017
Grant Date -
May 12, 2016
app pub date -
Jan 19, 2016
filing date -
May 27, 2011
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Abstract
Aspects and embodiments of the present invention are directed to spectrometry systems and for apparatus and methods for delivering dopants to same. In one example, there is provided a dopant delivery device configured to supply dopants to a spectrometry system comprising a tube including a first chamber and a second chamber, a first dopant source included in the first chamber, and a second dopant source included in the second chamber.
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