MEMS variable capacitor with enhanced RF performance
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United States of America Patent
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Mar 7, 2017
Grant Date -
Nov 20, 2014
app pub date -
Sep 4, 2012
filing date -
Sep 2, 2011
priority date (Note) -
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Abstract
In a MEMS device, the manner in which the membrane lands over the RF electrode can affect device performance. Bumps or stoppers placed over the RF electrode can be used to control the landing of the membrane and thus, the capacitance of the MEMS device. The shape and location of the bumps or stoppers can be tailored to ensure proper landing of the membrane, even when over-voltage is applied. Additionally, bumps or stoppers may be applied on the membrane itself to control the landing of the membrane on the roof or top electrode of the MEMS device.
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