Method and apparatus of operating a scanning probe microscope
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United States of America Patent
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Mar 7, 2017
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Apr 25, 2016
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Nov 13, 2008
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Abstract
An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.
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