Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)
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United States of America Patent
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Mar 7, 2017
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Jul 23, 2015
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Jan 23, 2014
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Jan 23, 2014
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Abstract
Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterometry involves impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles. The method also involves collecting at least a portion of the scattered X-ray beam.
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