Semi-auto scanning probe microscopy scanning
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United States of America Patent
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Mar 7, 2017
Grant Date -
Jan 31, 2013
app pub date -
Jul 26, 2012
filing date -
Jul 28, 2011
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Abstract
A semi-automated method for atomic force microscopy (“AFM”) scanning of a sample is disclosed. The method can include manually teaching a sample and AFM tip relative location on an AFM tool; then scanning, via a predefined program, on the same sample or other sample with same pattern to produce more images automatically.
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