Silicon-based monolithic integrated sonar array
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United States of America Patent
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Feb 28, 2017
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Mar 11, 2011
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Jan 24, 2011
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Abstract
The invention discloses a silicon-based monolithic integrated sonar array which includes a cantilevered sensing array structure, a sound-transparent jacket, and a support structure. The cantilevered sensing array structure is fixed on the support structure and in the sound-transparent jacket, wherein the sound-transparent jacket is filled with insulating dielectric oil, and the cantilevered sensing array structure is immersed in the insulating dielectric oil. The sound-transparent jacket is sealed and is treated with water tightness processing. The array can be applied into devices for underwater ultrasonic imaging, ultrasonic ranging, torpedo navigating, etc.
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