Extreme ultraviolet source with dual magnetic cusp particle catchers
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United States of America Patent
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Feb 21, 2017
Grant Date -
May 26, 2016
app pub date -
Nov 17, 2015
filing date -
Nov 21, 2014
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Abstract
A laser-produced plasma extreme ultraviolet source has a buffer gas to slow ions down and thermalize them in a low-temperature plasma. The plasma is initially trapped in a mirror magnetic field configuration with a low magnetic field barrier to axial motion. Plasma overflows axially at each end of the mirror into magnetic cusps and is conducted by radial magnetic field lines to annular beam dumps disposed around the waist of each cusp.
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