Piezoelectric device and method for producing piezoelectric device
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United States of America Patent
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Feb 21, 2017
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Jan 27, 2014
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Jul 29, 2011
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Abstract
A piezoelectric device that prevents defects due to pyroelectric charge without limiting how the piezoelectric device can be used includes a first metal layer located on a bonding surface of a piezoelectric single crystal substrate. A second metal layer is located on a bonding surface of a support substrate. The first and second metal layers are overlaid on each other to define a metal bonded layer. Subsequently, by oxidizing the metal bonded layer, a semi-conducting layer is formed.
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