System for the combined, probe-based mechanical and electrical testing of MEMS
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United States of America Patent
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Feb 21, 2017
Grant Date -
Jul 23, 2015
app pub date -
Oct 17, 2014
filing date -
Jan 17, 2014
priority date (Note) -
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Abstract
A system for testing MEMS-structures includes a microforce sensor, two or more multi-axis micropositioning units, at least one electrical probe and a sample holder on which a MEMS-structure is mounted. At least one of the multi-axis micropositioning units is motorized and at least one additional micropositioning unit is equipped with at least one electrical probe to apply electrical signals or to measure electrical signals at one or multiple locations on the MEMS structure. The system with the aforementioned components allows a combined electrical and probe-based mechanical testing of MEMS-structures.
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