Controlled deposition of metal and metal cluster ions by surface field patterning in soft-landing devices
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United States of America Patent
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Feb 21, 2017
Grant Date -
Feb 12, 2015
app pub date -
Nov 12, 2013
filing date -
Apr 21, 2010
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Abstract
A soft-landing (SL) instrument for depositing ions onto substrates using a laser ablation source is described herein. The instrument of the instant invention is designed with a custom drift tube and a split-ring ion optic for the isolation of selected ions. The drift tube allows for the separation and thermalization of ions formed after laser ablation through collisions with an inert bath gas that allow the ions to be landed at energies below 1 eV onto substrates. The split-ring ion optic is capable of directing ions toward the detector or a landing substrate for selected components. The inventors further performed atomic force microscopy (AFM) and drift tube measurements to characterize the performance characteristics of the instrument.
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