Micromechanical resonators
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United States of America Patent
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Feb 14, 2017
Grant Date -
Oct 31, 2013
app pub date -
Oct 12, 2011
filing date -
Oct 12, 2010
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Abstract
Embodiments of the invention include micromechanical resonators. These resonators can be fabricated from thin silicon layers. Both rotational and translational resonators are disclosed. Translational resonators can include two plates coupled by two resonate beams. A stable DC bias current can be applied across the two beams that causes the plates to resonate. In other embodiments, disk resonators can be used in a rotational mode. Other embodiments of the invention include using resonators as timing references, frequency sources, particle mass sensors, etc.
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