Strain mapping in TEM using precession electron diffraction
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United States of America Patent
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Feb 14, 2017
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May 19, 2016
app pub date -
May 23, 2014
filing date -
May 24, 2013
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Abstract
A sample material is scanned with a transmission electron microscope (TEM) over multiple steps having a predetermined size at a predetermined angle. Each scan at a predetermined step and angle is compared to a template, wherein the template is generated from parameters of the material and the scanning. The data is then analyzed using local mis-orientation mapping and/or Nye's tensor analysis to provide information about local strain states.
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