Methods of manufacturing large-area sputtering targets using interlocking joints

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United States of America Patent

PATENT NO 9564299
APP PUB NO 20160163520A1
SERIAL NO

15042987

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Abstract

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In various embodiments, joined sputtering targets are formed at least in part by spray deposition of the sputtering material and/or welding.

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Patent Owner(s)

Patent OwnerAddress
H C STARCK SOLUTIONS EUCLID LLC21801 TUNGSTEN ROAD EUCLID OH 44117-1117

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gaydos, Mark Nashua, US 19 366
Loewenthal, William Chesterland, US 7 29
Miller, Steven Alfred Canton, US 8 33
Volchko, Scott Jeffrey Cleveland, US 15 100
Zimmermann, Stefan Kraftwekweg, DE 59 707

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