Ion beam measuring device and method of measuring ion beam
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United States of America Patent
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Feb 7, 2017
Grant Date -
Jan 1, 2015
app pub date -
Jun 25, 2014
filing date -
Jun 26, 2013
priority date (Note) -
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Abstract
An ion beam measuring device includes: a mask that is used for shaping an original ion beam into a measuring ion beam including a y beam part elongated in a y direction that is perpendicular to a traveling direction of the ion beam and an x beam part elongated in an x direction that is perpendicular to the traveling direction and the y direction; a detection unit that is configured to detect an x-direction position of the y beam part and a y-direction position of the x beam part; and a beam angle calculating unit that is configured to calculate an x-direction beam angle using the x-direction position and a y-direction beam angle using the y-direction position.
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