gas sensor for detection at room temperature

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United States of America Patent

PATENT NO 9562884
SERIAL NO

14896342

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Abstract

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A method for manufacturing an NO2 gas sensor for detection at room temperature comprises: manufacturing a metal electrode on a surface of a flexible substrate; manufacturing an SWCNTs/SnO2 sensitive film; and bonding the SWCNTs/SnO2 sensitive film with a portion of the surface of the flexible substrate with the metal electrode, so as to form the NO2 gas sensor for detection at room temperature. The present disclosure solves the problems of the poor adhesion between the sensitive material and the flexible substrate, and a non-uniform distribution, and achieves the purposes of secure bonding between the sensitive material and the flexible substrate, and uniform distribution.

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Patent Owner(s)

Patent OwnerAddress
INSTITUTE OF MICROELECTRONICS CHINESE ACADEMY OF SCIENCESNO 3 BEITUCHENG WEST ROAD CHAOYANG DISTRICT BEIJING 100029 100029

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Xin Beijing, CN 816 7998
Li, Dongmei Beijing, CN 46 76
Liang, Shengfa Beijing, CN 7 5
Liu, Ming Beijing, CN 547 2816
Xie, Changqing Beijing, CN 19 13
Zhan, Shuang Beijing, CN 4 0

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