Micromechanical devices comprising n-type doping agents
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United States of America Patent
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Jan 31, 2017
Grant Date -
Mar 20, 2014
app pub date -
Feb 17, 2012
filing date -
Feb 17, 2011
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Abstract
The invention concerns a micromechanical device and method of manufacturing thereof. The device comprises an oscillating or deflecting element made of semiconductor material comprising n-type doping agent and excitation or sensing means functionally connected to said oscillating or deflecting element. According to the invention, the oscillating or deflecting element is essentially homogeneously doped with said n-type doping agent. The invention allows for designing a variety of practical resonators having a low temperature drift.
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