Microwave-annealed indium gallium zinc oxide films and methods of making the same

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United States of America Patent

PATENT NO 9559249
APP PUB NO 20160027955A1
SERIAL NO

14806050

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Abstract

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A microwave-annealed indium gallium zinc oxide (IGZO) film and methods of making the same are disclosed. The methods may comprise: depositing an IGZO film onto a substrate; and microwave annealing the IGZO film to produce a microwave-annealed IGZO film.

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Patent Owner(s)

Patent OwnerAddress
ARIZONA BOARD OF REGENTS ON BEHALF OF ARIZONA STATE UNIVERSITY1475 NORTH SCOTTSDALE ROAD SKYSONG - SUITE 200 SCOTTSDALE AS 85257-9908

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Alford, Terry L Tempe, US 14 107
Dhar, Aritra Tempe, US 9 56

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