Method and device for pumping of a process chamber
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United States of America Patent
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Jan 31, 2017
Grant Date -
Jun 18, 2015
app pub date -
Jul 15, 2013
filing date -
Jul 19, 2012
priority date (Note) -
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Abstract
A pumping device intended to be connected to a process chamber (2) includes a dry primary vacuum pump, an auxiliary pump mounted so that the auxiliary pump bypasses a check valve on the vacuum pump, a first valve device connected to a purging device for purging the dry primary vacuum pump and intended to be connected to a gas supply, a second valve device mounted so that the second valve device bypasses a check valve upstream from the auxiliary pump, and a controller configured to control the first and second valve devices on the basis of an operating status of the process chamber in such a way that the first valve device is at least partially closed and the second valve device is open when the process chamber is operating at ultimate vacuum. Also a method for pumping of a process chamber by way of such a pumping device.
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