Conductive polymer composition, coated article having antistatic film formed from the composition, and patterning process using the composition
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United States of America Patent
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Jan 31, 2017
Grant Date -
May 21, 2015
app pub date -
Jun 6, 2013
filing date -
Jul 2, 2012
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Abstract
The present invention is a conductive polymer composition containing a π-conjugated conductive polymer, a polyanion, and a gemini surfactant. There can be provided a conductive polymer composition that has excellent antistatic performance and excellent application properties, does not adversely affect a resist, and can be suitably used in lithography using electron beam or the like.
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