Integrated apertured micromirror and applications thereof
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United States of America Patent
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Jan 31, 2017
Grant Date -
Sep 18, 2014
app pub date -
Mar 14, 2014
filing date -
Mar 18, 2013
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Abstract
An integrated apertured micromirror is provided in which the micromirror is monolithically integrated with a micro-optical bench fabricated on a substrate using a lithographic and deep etching technique. The micromirror has an aperture therein and is oriented such that the micromirror is optically coupled to receive an incident beam having an optical axis in a plane of the substrate and to at least partially transmit the incident beam therethrough via the aperture.
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