Method and arrangement for operating a dynamic nano focusing system
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United States of America Patent
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Jan 31, 2017
Grant Date -
Jul 17, 2014
app pub date -
Jul 5, 2012
filing date -
Aug 1, 2011
priority date (Note) -
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Abstract
The invention relates to a method and to an arrangement for operating a dynamic nano focusing system for use thereof in the field of microscopy, interferometry or similar applications, wherein the nano focusing system comprises a lever-transmission piezo actuator and a frictionless guide based on a resiliently deformable solid body joint which is connected to a mounting unit, in particular for a lens, in order to implement the desired adjustment paths for the focusing. According to the invention, in order to increase the dynamics during the focusing process, a secondary fine adjustment movement is superimposed on the primary adjustment movement, said secondary fine adjustment movement having a smaller adjustment path but higher frequency than the primary adjustment movement, wherein, when the fine adjustment is carried out, a determination is made as to whether the focusing result changes, in order to specify according thereto the amount and/or the direction of the primary adjustment movement.
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