SiC high temperature pressure transducer

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9557230
APP PUB NO 20140238144A1
SERIAL NO

14352737

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention concerns a pressure transducer comprising a deflecting membrane, said membrane comprising two piezoresistors (10, 11) of different types, said piezoresistors being arranged such that a same stress or a same strain is applied on said piezoresistors and said piezoresistors (10, 11) yield changes in resistance, wherein a piezoresistor of a first type (10) is positioned such that its current direction is perpendicular to the stress direction (trans verse) and a piezoresistor of a second type is parallel to the stress direction (longitudinal), allowing, when a tensile stress is applied to the transducer, said piezoresistor of the first type to increase its resistance and said piezoresistor of the second type to decrease the resistance; or when a compressive stress is applied to the transducer, said piezoresistor of the first type to decrease its resistance and said piezoresistor of the second type to increase the resistance; wherein said piezoresistor of the first type (10) has a specific width and a length as short as possible and said piezoresistor (11) of the second type has a width as short as possible and a length as long as possible.

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Patent Owner(s)

Patent OwnerAddress
CSEM CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE SA - RECHERCHE ET DEVELOPPEMENTRUE JAQUET-DROZ 1 NEUCHÂTEL CH-2002

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akiyama, Terunobu Neuchatel, CH 6 54

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