Gas separation
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United States of America Patent
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Jan 31, 2017
Grant Date -
Aug 13, 2015
app pub date -
Jul 23, 2013
filing date -
Jul 25, 2012
priority date (Note) -
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Abstract
A device for gas movement in vacuum-coating systems is disclosed that extracts gaseous coating material in the coating chamber that has not been deposited on the substrates to be coated. At least one pump for extracting the coating material is connected to it in an axial extension of the suction device; the suction device has one or more suction openings and is divided up into at least two axial areas whose suction characteristics can be adjusted separately from one another to a great extent.
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