High definition heater system having a fluid medium
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United States of America Patent
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Jan 24, 2017
Grant Date -
Aug 29, 2013
app pub date -
Aug 30, 2012
filing date -
Aug 30, 2011
priority date (Note) -
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Abstract
An apparatus, such as a heater, is provided that includes a base member having at least one fluid passageway. A two-phase fluid is disposed within the fluid passageway, a pressure of the two-phase fluid being controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. A tuning layer is secured to the base member, and the tuning layer includes a plurality of zones. Furthermore, a component, such as a chuck by way of example, is secured to the tuning layer.
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