Photoacoustic gas sensor with a helmholtz cell
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United States of America Patent
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Jan 24, 2017
Grant Date -
Oct 25, 2012
app pub date -
Apr 19, 2012
filing date -
Apr 21, 2011
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Abstract
A photoacoustic detection device including a nanophotonic circuit including a first chip on which is formed at least one optical waveguide and in which is formed a set of cavities defining a Helmholtz resonator; at least one optical source capable of emitting an optical signal in a given wavelength range, capable of being modulated at an acoustic modulation frequency, this source being attached to the first chip; a second chip forming a cap for said cavities and including acoustic sensors; and electronic circuits for processing the output of the acoustic sensors formed in the first or the second chip.
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