Pressure sensor having cantilever and displacement measurement unit
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United States of America Patent
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Jan 24, 2017
Grant Date -
Apr 9, 2015
app pub date -
Mar 19, 2013
filing date -
May 2, 2012
priority date (Note) -
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Abstract
A pressure sensor includes a sensor body which has a first surface and a cavity with an opening in the first surface, a cantilever which has a base end portion supported on the first surface and a distal end portion provided to form a gap from a peripheral edge of the opening inside the opening, is flexurally deformed according to a pressure difference between an inside and an outside of the cavity, and is formed of a semiconductor material, and a displacement measurement unit which measures a displacement of the cantilever vibrating according to the pressure difference at a frequency larger than a lower limit frequency fLOW (Hz) defined by Expression (1), where a width (μm) of the gap is represented by G, a volume (ml) of the cavity is represented by V, and a proportional constant is represented by k.
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