Alignment stage
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United States of America Patent
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Jan 17, 2017
Grant Date -
Oct 24, 2013
app pub date -
Nov 25, 2011
filing date -
Nov 29, 2010
priority date (Note) -
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Abstract
An alignment stage including: a base plate; one or more X direction thrust generation guide mechanisms for generating thrust and performing guidance in the direction of a straight line X; a pair of lower plates disposed above the X direction thrust generation guide mechanisms; a pair of upper plates provided corresponding to the lower plates, respectively; a pair of rotatable bearings disposed between the lower plates and the upper plates; one or more Y direction thrust generation guide mechanisms for generating thrust and performing guidance in the direction of a straight line Y perpendicular to the straight line X; and a table plate disposed above the Y direction thrust generation guide mechanisms. With this configuration, it is possible for the alignment stage to be compact and easy to assemble.
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