Semiconductor device and method of manufacturing the same

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United States of America Patent

PATENT NO 9548387
APP PUB NO 20140191335A1
SERIAL NO

13812941

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Abstract

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The present invention discloses a semiconductor device, comprising a plurality of fins located on a substrate and extending along a first direction; a plurality of gate stack structures extending along a second direction and across each of the fins; a plurality of stress layers located in the fins on both sides of the gate stack structures and having a plurality of source and drain regions therein; a plurality of channel regions located in the fins below the gate stack structures; characterized in that the stress layers have connected parts in the fins and that the channel regions enclose the connected parts.

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Patent Owner(s)

Patent OwnerAddress
THE INSTITUTE OF MICROELECTRONICS CHINESE ACADEMY OF SCIENCESNO 3 BEITUCHENG WEST ROAD CHAOYANG DISTRICT BEIJING 100029

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Dapeng Beijing, CN 86 612
Ma, Xiaolong Beijing, CN 66 855
Qin, Changliang Beijing, CN 13 229
Xu, Qiuxia Beijing, CN 62 613
Yin, Huaxiang Beijing, CN 123 2170

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