Attaching apparatus

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United States of America Patent

PATENT NO 9548232
APP PUB NO 20150325463A1
SERIAL NO

14408903

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Abstract

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An attaching apparatus, a substrate and a support that can be uniformly attached through an adhesive layer. The attaching apparatus is equipped with a set plate and a press plate formed of ceramics. The set plate and the press plate have a flatness of 1.0 μm or less when not pressed.

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Patent Owner(s)

Patent OwnerAddress
AIMECHATEC LTD5-2 KOYODAI RYUGASAKI-SHI IBARAKI

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Inao, Yoshihiro Kawasaki, JP 46 445
Kato, Shigeru Kawasaki, JP 102 2474
Katsuragawa, Junichi Kawasaki, JP 8 39

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