Spatial light modulator based on metamaterial structure and preparation method thereof

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United States of America Patent

PATENT NO 9547185
APP PUB NO 20160209680A1
SERIAL NO

14899071

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Abstract

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A spatial light modulator based on a metamaterial structure and a preparation method thereof. The spatial light modulator includes an array of optical function elements and a control circuit. The optical function element includes a metamaterial structure formed by a metal nanostructure layer and a metal reflector layer, with a medium layer and nonmetal conducting material layer being provided between the metal nanostructure layer and the metal reflector layer. The spatial light modulator is simple in structure, high in integration, easy in manufacture and low in cost. Furthermore, the spatial light modulator is capable of high-speed modulation, the depth of modulation is controlled easily, and a low drive voltage may be obtained.

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Patent Owner(s)

Patent OwnerAddress
SUZHOU INSTITUTE OF NANO-TECH AND NANO-SCIENCES CHINESE ACADEMY OF SCIENCESNO 398 RUOSHUI ROAD JIANGSU PROVINCE SIP SUZHOU 315123

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Qin SIP Suzhou, CN 78 509
Song, Shichao SIP Suzhou, CN 2 27

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