Extreme ultraviolet source with magnetic cusp plasma control
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United States of America Patent
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Jan 10, 2017
Grant Date -
Aug 18, 2016
app pub date -
Feb 18, 2016
filing date -
Jun 27, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
A laser-produced plasma extreme ultraviolet source has a buffer gas to slow ions down and thermalize them in a low temperature plasma. The plasma is initially trapped in a symmetrical cusp magnetic field configuration with a low magnetic field barrier to radial motion. Plasma overflows in a full range of radial directions and is conducted within a cone-shaped sheet to an annular beam dump.
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International Classification(s)
- 2016 Application Filing Year
- H05G Class
- 216 Applications Filed
- 175 Patents Issued To-Date
- 81.02 % Issued To-Date
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- 0 Citation Count
- H05G Class
- 0 % this patent is cited more than
- 8 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jul 10, 2028 |
