Ohmic contact to semiconductor
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United States of America Patent
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Jan 10, 2017
Grant Date -
Apr 14, 2016
app pub date -
Dec 17, 2015
filing date -
Feb 23, 2012
priority date (Note) -
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Abstract
A solution for forming an ohmic contact to a semiconductor layer is provided. A masking material is applied to a set of contact regions on the surface of the semiconductor layer. Subsequently, one or more layers of a device heterostructure are formed on the non-masked region(s) of the semiconductor layer. The ohmic contact can be formed after the one or more layers of the device heterostructure are formed. The ohmic contact formation can be performed at a processing temperature lower than a temperature range within which a quality of a material forming any semiconductor layer in the device heterostructure is damaged.
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