Electron beam equipment
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United States of America Patent
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Jan 10, 2017
Grant Date -
Feb 5, 2015
app pub date -
Jul 29, 2014
filing date -
Jul 31, 2013
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Abstract
To improve the efficiency of generation of chromatic aberrations of an energy filter for reducing energy distribution. Mounted are an energy filter for primary electrons, the energy filter having a beam slit and a pair of a magnetic deflector and an electrostatic deflector that are superimposed with each other. An electron lens is arranged between the beam slit and the pair of the magnetic deflector and the electrostatic deflector.
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