Charged particle beam system and method of operating a charged particle beam system
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United States of America Patent
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Jan 3, 2017
Grant Date -
Jan 8, 2015
app pub date -
Jun 25, 2014
filing date -
Jul 8, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
The present disclosure relates to a gas field ion source having a gun housing, an electrically conductive gun can base attached to the gun housing, an inner tube mounted to the gun can base, the inner tube being made of an electrically isolating ceramic, an electrically conductive tip attached to the inner tube, an outer tube mounted to the gun can base, the outer tube being made of an electrically isolating ceramic, and an extractor electrode attached to the outer tube. The extractor electrode can have an opening for the passage of ions generated in proximity to the electrically conductive tip.
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