Photomask with three states for forming multiple layer patterns with a single exposure
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Jan 3, 2017
Issued Date -
N/A
app pub date -
Sep 18, 2013
filing date -
May 14, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present disclosure provides one embodiment of a mask for a lithography exposure process. The mask includes a mask substrate; a first mask material layer patterned to have a first plurality of openings that define a first layer pattern; and a second mask material layer patterned to have a second plurality of openings that define a second layer pattern.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD | HSINCHU 300-78 |
International Classification(s)

- 2013 Application Filing Year
- H01L Class
- 22267 Applications Filed
- 20713 Patents Issued To-Date
- 93.03 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Chen, Jeng-Horng | Hsin-Chu, TW | 137 | 3250 |
# of filed Patents : 137 Total Citations : 3250 | |||
Lu, Yen-Cheng | New Taipei, TW | 85 | 1437 |
# of filed Patents : 85 Total Citations : 1437 | |||
Shih, Chih-Tsung | Hsinchu, TW | 146 | 2276 |
# of filed Patents : 146 Total Citations : 2276 | |||
Yen, Anthony | Hsinchu, TW | 157 | 3414 |
# of filed Patents : 157 Total Citations : 3414 | |||
Yu, Shinn-Sheng | Hsinchu, TW | 132 | 3917 |
# of filed Patents : 132 Total Citations : 3917 |
Cited Art Landscape
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Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 8 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jul 3, 2028 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

Legal Events
Date | Code | Event | Description |
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Nov 05, 2007 | STCH | INFORMATION ON STATUS: PATENT DISCONTINUATION | free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
Oct 07, 2007 | FP | LAPSED DUE TO FAILURE TO PAY MAINTENANCE FEE | Effective Date: Oct 07, 2007 |
Oct 07, 2007 | LAPS | LAPSE FOR FAILURE TO PAY MAINTENANCE FEES | |
Apr 25, 2007 | REMI | MAINTENANCE FEE REMINDER MAILED | |
Oct 07, 2003 | I | Issuance | |
May 30, 2002 | P | Published | |
Jan 07, 2002 | F | Filing | |
Jan 11, 2000 | PD | Priority Date |

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